PPPL School on Plasmas for Microelectronics and Quantum Information Science
July 28 - August 1, 2025

Scientists/engineers/students at national labs, universities, defense or private industry are welcome!


Application has been extended


Instructors

Generic placeholder thumbnail

Prof. Jane
Chang

UCLA
Generic placeholder thumbnail

Dr. Michael
Churchill

PPPL
Generic placeholder thumbnail

Prof. Vincent
Donnelly

U. of Houston
Generic placeholder thumbnail

Dr. Arturo
Dominguez

PPPL


Generic placeholder thumbnail

Dr. Valery
Godyak

RF Plasma Consulting
Generic placeholder thumbnail

Dr. Richard
Gottscho

Lam Research
Generic placeholder thumbnail

Prof. Satoshi
Hamaguchi

Osaka U
Generic placeholder thumbnail

Dr. Igor
Kaganovich

PPPL


Generic placeholder thumbnail

Prof. Alice
Kunin

Princeton U
Generic placeholder thumbnail

Dr. Catherine
Labelle

Intel Corporation
Generic placeholder thumbnail

Dr. Thorsten
Lill

Lam Research
Generic placeholder thumbnail

Dr. Mark
Martirez

PPPL


Generic placeholder thumbnail

Dr. Jon
Menard

PPPL
Generic placeholder thumbnail

Dr. Yevgeny
Raitses

PPPL
Generic placeholder thumbnail

Dr. Shahid
Rauf

Applied Materials
Generic placeholder thumbnail

Prof. Alastair
Stacey

PPPL


Generic placeholder thumbnail

Prof. Saien
Xie

Princeton U.

Summer School Description

In 2025 the school will be a collaboration between PPPL and two Department of Energy Microelectronics Science Research Centers. The school will focus on the application of plasmas to microelectronics and quantum information science. It will include an introduction to relevant plasma physics fundamentals and modules on the application of a variety of technical plasmas to material synthesis, modification and processing in microelectronics and quantum information science fields. Focus topics include:

The topics are approached from broad perspectives, and are intended for participants with primary backgrounds in plasma science, interested in their application to microelectronics (ME) and quantum information science (QIS), as well as ME and QIS scientists interested in leveling up their understanding of plasma processing technologies. The topics are approached from a broad perspective and with minimal prerequisites.

Eligibility

Scientists, engineers and students at national labs, universities, defense or private industry are eligible to apply.

Support

For selected domestic, in-person participants, transportation, accommodations, and meals are included.

Hybrid Format

The 2025 GSS will have a hybrid format, with ~25 participants attending in person (travel, housing and meals covered), and ~25 virtual participants.

Agenda (subject to minor changes)

Location / Eastern Time Day 1 (7/28/25)
Maeder Hall		 Day 2 (7/29/25)
Maeder Hall		 Day 3 (7/30/25)
PPPL		 Day 4 (7/31/25)
PPPL		 Day 5 (8/1/25)
Maeder Hall
9:00am-9:30am Welcome / Logistics
Menard/Dominguez/Raitses/Stacey		 Friday Times (ET)
9:30am-10:30am Introduction to Microelectronics Technologies and Industry
Hamaguchi		 Microscopy and Spectroscopy to Characterize Processed Materials
Kunin		 Atomistic modeling of plasma-material interactions
Martirez		 9:00AM-10:30AM: What comes around goes around: Using AI to make AI
Gottscho		 8:30am-9:30am QIS Diamond Growth
Stacey
10:30am-10:45am BREAK BREAK BREAK BREAK 9:30am-9:40am BREAK
10:45am-11:45am Intro to QIS
Stacey		 Surface reaction and kinetics in state-of-the-art etching processes
Chang		 Plasma diagnostics for processing applications
Donnelly		 AI/ML in Fusion
Churchill		 9:40am-10:40am QIS Lecture
TBD
11:45am-1:00pm LUNCH LUNCH LUNCH LUNCH 10:40am-10:50am BREAK
1:00pm-2:00pm What every scientist and engineer needs to know about low temperature plasma physics
Kaganovich		 Use of ALD and selective isotropic etch / ALE in the manufacturing of advanced logic and memory devices
Lill		 Synthesis of atomically thin transition metal dichalcogenides and their heterostructures
Xie		 Advanced plasma sources for nanofabrication
Raitses		 10:50am-11:50am QIS Perspectives
TBD
2:00pm-2:15pm BREAK BREAK PPPL Tour
Dominguez		 Poster Session
Local Participants		 11:50am-1:00pm LUNCH
2:15pm-3:15pm Fundamentals of Plasma Chemistry
Chang		 An Introduction to Low Temperature Plasma Modeling – A Semiconductor Industry Perspective
Rauf		 PPPL Tour
Dominguez		 Poster Session
Local Participants		 1:00pm-2:00pm Plasmas in Microelectronics – Enabling the Future of Microelectronics
Labelle
3:15pm-3:30pm BREAK BREAK PPPL Tour
Dominguez		 Poster Session
Local Participants		 2:00pm-2:15pm Closing Remarks
Dominguez/Raitses/Stacey
3:30pm-4:30pm Plasma sources for processing
Godyak		 Flash talks
Remote Participants		 PPPL Tour
Dominguez		 Poster Session
Local Participants

Organizers

The Summer School is organized by:

and administered by: