Summer School Description

In 2025 the school will be a collaboration between PPPL and two Department of Energy Microelectronics Science Research Centers. The school will focus on the application of plasmas to microelectronics and quantum information science. It will include an introduction to relevant plasma physics fundamentals and modules on the application of a variety of technical plasmas to material synthesis, modification and processing in microelectronics and quantum information science fields. Focus topics include:

• State of the art silicon etching
• Plasma diagnostics for modern plasma processing equipment
• Characteristics and applications of different plasma sources
• Computational tools for plasma/materials interactions and digital twins
• Plasmas for material deposition and epitaxy
• EUV/Lithography

The topics are approached from broad perspectives, and are intended for participants with primary backgrounds in plasma science, interested in their application to microelectronics (ME) and quantum information science (QIS), as well as ME and QIS scientists interested in leveling up their understanding of plasma processing technologies. The topics are approached from a broad perspective and with minimal prerequisites.

Eligibility

Scientists, engineers and students at national labs, universities, defense or private industry are eligible to apply.

Hybrid Format

The 2025 GSS will have a hybrid format, with ~25 participants attending in person (travel, housing and meals covered), and ~25 virtual participants.